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Sputtering by particle bombardment vol 0003: characteristics of sputtered particles, technical applications.
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Other Personal Name(s): “...Behrisch, R....”
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Sputtering by particle bombardment vol 0002: sputtering of alloys and compounds, electron and neutron sputtering, surface topography.
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Ion surface interaction, sputtering and related phenomena : Proceedings of the international conf. held at Garching, 24.-27.9.1972.
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