Microlithography world
ZB; Vol. 7. 1998 - Vol. 12. 2003
1074407X
Tulsa, OK : Microlithography World.
T - Engineering sciences ( journals )
Location: Magazin, 1. Etage links
ZB; Vol. 7. 1998 - Vol. 12. 2003
Available as an e-journal?
LEADER 00556cas a2200205 n 4500
001 172315
005 20050623110200.0
022 |a 1074407X 
035 |a (Sirsi) a10063 
037 |a Erwerb eingestellt 
084 0 |a T - Engineering sciences ( journals )  |2 ZB 
222 |a Microlithography world   |b [Zeitschrift] 
245 0 0 |a Microlithography world 
260 |a Tulsa, OK :   |b Microlithography World. 
596 |a 1 
900 |a Z 004886 / / 11 
902 |a ZB16 
920 |a ZDB 1204146-4 
921 |a Magazin 1. Etage 
866 3 1 |z ZB;   |a Vol. 7. 1998 - Vol. 12. 2003