APA Citation

Morgan, R. A. (1985). Plasma etching in semiconductor fabrication. Amsterdam: Elsevier.

Chicago Style Citation

Morgan, R. A. Plasma Etching in Semiconductor Fabrication. Amsterdam: Elsevier, 1985.

MLA Citation

Morgan, R. A. Plasma Etching in Semiconductor Fabrication. Amsterdam: Elsevier, 1985.

Warning: These citations may not always be 100% accurate.