Morgan, R. A. (1985). Plasma etching in semiconductor fabrication. Amsterdam: Elsevier.
Chicago Style CitationMorgan, R. A. Plasma Etching in Semiconductor Fabrication. Amsterdam: Elsevier, 1985.
MLA CitationMorgan, R. A. Plasma Etching in Semiconductor Fabrication. Amsterdam: Elsevier, 1985.
Warning: These citations may not always be 100% accurate.