APA Citation

Powell, R. A. (1984). Dry etching for microelectronics. Amsterdam: North Holland.

Chicago Style Citation

Powell, R. A. Dry Etching for Microelectronics. Amsterdam: North Holland, 1984.

MLA Citation

Powell, R. A. Dry Etching for Microelectronics. Amsterdam: North Holland, 1984.

Warning: These citations may not always be 100% accurate.