Powell, R. A. (1984). Dry etching for microelectronics. Amsterdam: North Holland.
Chicago Style CitationPowell, R. A. Dry Etching for Microelectronics. Amsterdam: North Holland, 1984.
MLA CitationPowell, R. A. Dry Etching for Microelectronics. Amsterdam: North Holland, 1984.
Warning: These citations may not always be 100% accurate.