An introduction to semiconductor microtechnology.
Saved in:
Personal Name(s): | Morgan, D. V. |
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Board, K. | |
Edition: |
Repr. with corr. |
Imprint: |
Chichester :
Wiley,
1985.
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Physical Description: |
XII, 167 S. |
Note: |
englisch |
ISBN: |
9780471901488 0471901482 |
Series Title: |
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Open University set book.
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Subject (ZB): | |
Classification: |
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---|---|---|---|
001 | 116041 | ||
005 | 19970518000000.0 | ||
008 | r1985 | ||
020 | |a 0471901482 | ||
035 | |a (Sirsi) a103467 | ||
084 | 0 | |a FGM - Microelectronic technology |2 ZB | |
245 | 0 | 3 | |a An introduction to semiconductor microtechnology. |
250 | |a Repr. with corr. | ||
260 | |a Chichester : |b Wiley, |c 1985. | ||
300 | |a XII, 167 S. | ||
490 | 0 | |a Open University set book. | |
500 | |a englisch | ||
596 | |a 1 | ||
650 | 4 | |a VLSI technology | |
650 | 4 | |a microtechnology | |
700 | 1 | |a Morgan, D. V. | |
700 | 1 | |a Board, K. | |
900 | |a B 060434'01'-1985 | ||
908 | |a Lehrbuch | ||
949 | |a B 060434'01'-1985 |w LC |c 1 |i 1087000344 |l STACKS |m ZB |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |2 HB |