Etching for pattern definition: proceedings of the symposium : Electrochemical Society: spring meeting. 1976 : Washington, DC, 02.05.1976-07.05.1976.
Saved in:
| Personal Name(s): | Hughes, H. G., editor |
|---|---|
| Imprint: |
Princeton, NJ :
Electrochemical Society,
1976.
|
| Physical Description: |
VI, 203 S. |
| Note: |
englisch |
| Subject (ZB): | |
| Classification: |
| LEADER | 00809cam a2200217 n 4500 | ||
|---|---|---|---|
| 001 | 116931 | ||
| 005 | 20001116162700.0 | ||
| 008 | r1976 | ||
| 035 | |a (Sirsi) a104172 | ||
| 084 | 0 | |a FGKJ - Plasma processing, etching |2 ZB | |
| 245 | 0 | 0 | |a Etching for pattern definition: proceedings of the symposium : |b Electrochemical Society: spring meeting. 1976 : Washington, DC, 02.05.1976-07.05.1976. |
| 260 | |a Princeton, NJ : |b Electrochemical Society, |c 1976. | ||
| 300 | |a VI, 203 S. | ||
| 500 | |a englisch | ||
| 596 | |a 1 | ||
| 650 | 4 | |a etching | |
| 700 | 1 | |a Hughes, H. G., |e Hrsg. | |
| 710 | 2 | |a Electrochemical Society. | |
| 900 | |a B 060636'01' | ||
| 908 | |a Konferenz | ||
| 949 | |a B 060636'01' |w LC |c 1 |i 1087001111 |d 16/11/2000 |e 27/8/1999 |l STACKS |m ZB |n 1 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |2 KONFERENZ | ||