@book{ Solr-104172, title = {Etching for pattern definition: proceedings of the symposium : Electrochemical Society: spring meeting. 1976 : Washington, DC, 02.05.1976-07.05.1976.}, author = {Hughes, H. G.}, editor = {Hughes, H. G.}, address = {Princeton, NJ}, publisher = {Electrochemical Society}, year = {1976}, note = {englisch}, }