Silicon materials.
Saved in:
| Personal Name(s): | Einspruch, N. G., editor |
|---|---|
| Imprint: |
Orlando, FL :
Academic Pr.,
1985.
|
| Physical Description: |
XII, 463 S. |
| Note: |
englisch |
| ISBN: |
9780122341120 0122341120 |
| Series Title: |
VLSI electronics microstructure science ;
12. |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
| LEADER | 00862cam a2200265 n 4500 | ||
|---|---|---|---|
| 001 | 117288 | ||
| 005 | 19990427143500.0 | ||
| 008 | r1985 | ||
| 020 | |a 0122341120 | ||
| 035 | |a (Sirsi) a104460 | ||
| 084 | 0 | |a FGM - Microelectronic technology |2 ZB | |
| 084 | 0 | |a FJKB - Elemental semiconductors |2 ZB | |
| 084 | 1 | |a FGM - Mikroelektronik - Technologie |2 LS | |
| 245 | 0 | 0 | |a Silicon materials. |
| 260 | |a Orlando, FL : |b Academic Pr., |c 1985. | ||
| 300 | |a XII, 463 S. | ||
| 490 | 0 | |a VLSI electronics microstructure science ; |v 12. | |
| 500 | |a englisch | ||
| 596 | |a 1 | ||
| 650 | 4 | |a VLSI technology | |
| 700 | 1 | |a Einspruch, N. G., |e Hrsg. | |
| 900 | |a B 054847'01'-012 | ||
| 900 | |a FGM 019-12 | ||
| 908 | |a Monographie, Sammelwerk | ||
| 949 | |a FGM 019-12 |w LC |c 1 |i 1087000648 |d 5/7/2004 |e 31/3/2004 |l STACKS |m ZB |n 1 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT | ||