IEEE transactions on semiconductor manufacturing / Institute of Electrical and Electronics Engineers
Saved in:
ISSN: | 08946507 |
---|---|
Imprint: |
New York, NY :
IEEE.
|
Note: |
Auch als E-Journal vorhanden |
Classification: | |
Collection: |
ZB; Vol. 3. 1990 Nr. 2-4 ZB; Vol. 4. 1991 - Vol. 11. 1998 |
Location: | Magazin, Erdgeschoss rechts |

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222 | |a IEEE transactions on semiconductor manufacturing |b [Zeitschrift] | ||
245 | 0 | 0 | |a IEEE transactions on semiconductor manufacturing / |c Institute of Electrical and Electronics Engineers |
260 | |a New York, NY : |b IEEE. | ||
500 | |a Auch als E-Journal vorhanden | ||
596 | |a 1 | ||
710 | 2 | |a Institute of Electrical and Electronics Engineers. | |
900 | |a Z 005244 / / 11 | ||
902 | |a ZB16 | ||
920 | |a ZDB 166215-6 | ||
921 | |a Magazin Erdgeschoss | ||
866 | 3 | 1 | |z ZB; |a Vol. 3. 1990 Nr. 2-4 |
866 | 3 | 1 | |z ZB; |a Vol. 4. 1991 - Vol. 11. 1998 |