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IEEE transactions on semiconductor manufacturing / Institute of Electrical and Electronics Engineers

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ISSN: 08946507
Imprint: New York, NY : IEEE.
Note: Auch als E-Journal vorhanden
Classification:
T - Engineering sciences ( journals )
Collection: ZB; Vol. 3. 1990 Nr. 2-4
ZB; Vol. 4. 1991 - Vol. 11. 1998
Location: Magazin, Erdgeschoss rechts
Available as an e-journal?

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022 |a 08946507 
035 |a (Sirsi) a10523 
084 0 |a T - Engineering sciences ( journals ) 
222 |a IEEE transactions on semiconductor manufacturing   |b [Zeitschrift] 
245 0 0 |a IEEE transactions on semiconductor manufacturing /   |c Institute of Electrical and Electronics Engineers 
260 |a New York, NY :   |b IEEE. 
500 |a Auch als E-Journal vorhanden 
596 |a 1 
710 2 |a Institute of Electrical and Electronics Engineers. 
900 |a Z 005244 / / 11 
902 |a ZB16 
920 |a ZDB 166215-6 
921 |a Magazin Erdgeschoss 
866 3 1 |z ZB;   |a Vol. 3. 1990 Nr. 2-4 
866 3 1 |z ZB;   |a Vol. 4. 1991 - Vol. 11. 1998 

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