IEEE transactions on semiconductor manufacturing / Institute of Electrical and Electronics Engineers
ZB; Vol. 3. 1990 Nr. 2-4
08946507
New York, NY : IEEE.
T - Engineering sciences ( journals )
Location: Magazin, Erdgeschoss rechts
ZB; Vol. 3. 1990 Nr. 2-4
ZB; Vol. 4. 1991 - Vol. 11. 1998
Available as an e-journal?
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