%0 Book %A Boyd, I. W. %E Boyd, I. W. %I Springer %D 1987 %C Berlin %G englisch %B Springer series in materials science ; %@ 3540179518 %@ 0387179518 %@ 9783540179511 %@ 9780387179513 %T Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators. %X Laser processing of thin films and microstructures: oxidation, deposition and etching o insulators :