Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators.
Laser processing of thin films and microstructures: oxidation, deposition and etching o insulators :
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| Personal Name(s): | Boyd, I. W. |
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| Imprint: |
Berlin :
Springer,
1987.
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| Physical Description: |
VIII, 320 S. |
| Note: |
englisch |
| ISBN: |
3540179518 0387179518 9783540179511 9780387179513 |
| Series Title: |
Springer series in materials science ;
vol 0003. |
| Subject (ZB): | |
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Reading Room  Call Number: CUM 029 Barcode: 1089103234
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Reading Room Call Number: FGJ 028-03 Barcode: 1087106039
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