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Metal semiconductor contacts and devices.

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Personal Name(s): Cohen, S. S.
Gildenblat, G. S.
Imprint: Orlando, FL : Academic Pr., 1986.
Physical Description: X, 424 S.
Note: englisch
ISBN: 0122341139
9780122341137
Series Title: VLSI electronics microstructure science ; 13.
Keywords: electrical characteristics of metal semiconductor interface
experimental methods of barrier height determination
test structures for ohmic contact characterization
metal semiconductor contact fabrication procedures
practical ohmic contacts to silicon
ohmic contacts to III-V semiconductors, polysilicon emitter contacts
metal semiconductor devices: Schottky barrier MOS transistors, Schottky diodes, field effect transistors
table: selected properties of commonly used metals
Subject (ZB):
VLSI (very large scale integration)
Classification:
FGM - Microelectronic technology
FGMH - Metallization, physics of microelectronics
FFPE - Thin film electronic properties, semiconductor interfaces
Shelf Classification:
FGM - Mikroelektronik - Technologie
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Reading Room Call Number: FGM 019-13 Barcode: 1088105937 Available   
Open Stacks Call Number: B 054847'01'-013 Barcode: 1088102206 Available   

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