Physics of thin films. 13.
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Personal Name(s): | Francombe, M. H., editor |
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Imprint: |
San-Diego, CA :
Academic Pr.,
1987.
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Physical Description: |
XI, 249 S. |
Note: |
englisch |
ISBN: |
0125330138 9780125330138 |
Series Title: |
Physics of thin films ;
13. |
Keywords: |
ionized cluster beam deposition and epitaxy the activated reactive evaporation process ion beam processing of optical thin films laser induced etching contacts to gallium arsenide devices |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
ZB | |
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