The silicon / SiO2 system.

Saved in:
Balk, P., (editor)
Amsterdam : Elsevier, 1988.
IX, 356 S.
englisch
9780444426031
0444426035
Materials science monographs ; vol 0032.
technology and kinetics of SiO2 growth
physical structure and chemical nature of the silicon/SiO2 interfacial region
the oxidation process and silicon/SiO2 system properties
charge trapping in SiO2 and the silicon/SiO2 interface
electrical evaluation of the silicon/SiO2 system

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