Leading edge of VLSI manufacturing technology : Semicon / Osaka Technology Seminar : 1987: proceedings : Osaka, 25.06.87-26.06.87.

Saved in:
Mountain-View, CA : Semiconductor Equipment and Materials Institute, 1987.
II, 328 S.
sonstige
VLSI technology
FGM - Microelectronic technology
LEADER 00807nam a2200205 n 4500
001 122804
005 19970518000000.0
008 r1987
035 |a (Sirsi) a109272 
084 0 |a FGM - Microelectronic technology  |2 ZB 
245 0 0 |a Leading edge of VLSI manufacturing technology :   |b Semicon / Osaka Technology Seminar : 1987: proceedings : Osaka, 25.06.87-26.06.87. 
260 |a Mountain-View, CA :   |b Semiconductor Equipment and Materials Institute,   |c 1987. 
300 |a II, 328 S. 
500 |a sonstige 
596 |a 1 
653 |a VLSI technology 
710 2 |a Semiconductor Equipment and Materials Institute (Mountain View, Calif.) 
900 |a B 064245'01' 
908 |a Konferenz 
949 |a B 064245'01'  |w LC  |c 1  |i 1088103313  |l STACKS  |m ZB  |r Y  |s Y  |t ZBB  |u 25/3/2009  |x ZB-F  |1 PRINT  |2 KONFERENZ