Analytical techniques for thin films.
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| Personal Name(s): | Tu, K. N., editor |
|---|---|
| Imprint: |
Boston, MA :
Academic Pr.,
1988.
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| Physical Description: |
XI, 493 S. |
| Note: |
englisch |
| ISBN: |
9780123418272 0123418275 |
| Series Title: |
Treatise on materials science and technology ;
27. |
| Keywords: |
submicron structure and microanalysis synchrotron radiation photoemission studies of interfaces ESCA (XPS) modern developments in soft X-ray imaging X-ray diffraction analysis of strains and stresses in thin films X-ray diffraction analysis of diffusion in thin films cross sectional transmission electron microscopy of electronic and photonic devices high resolution transmission electron microscopy of surfaces and interfaces scanning transmission electron microscopy Rutherford backscattering spectroscopy (RBS) on thin solid films atomic structure and atomic layer compositional analysis of thin solid films using the time of flight atom probe field ion microscopy (APFIM) |
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| ZB | |
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