Discharge parameters and chemistry.
Saved in:
Personal Name(s): | Auciello, O., editor |
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Imprint: |
Boston :
Academic Pr.,
1989.
|
Physical Description: |
XII, 456 S. |
Note: |
englisch |
ISBN: |
0120676354 9780120676354 |
Series Title: |
Plasma-materials interactions.
Plasma diagnostics ; 1. |
Keywords: |
electric discharge : light source plasma : mass spectroscopy microwave : plasma diagnostics electron spin resonance : plasma diagnostics |
Subject (ZB): | |
Classification: |