Growth of single crystalline and polycrystalline titanium nitride and zirconium nitride thin films by reactive sputtering : influence of low energy ion irradiation / L. Hultman
Saved in:
| Personal Name(s): | Hultman, L. |
|---|---|
| Imprint: |
Linköping :
Universitet i Linköping
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| Physical Description: |
187 S. |
| Note: |
englisch |
| ISBN: |
917870345X 9789178703456 |
| Series Title: |
Linköping studies in science and technology. Dissertations ;
186 |
| Classification: |
| ZB | |
|---|---|
Open Stacks  Call Number: S 006237-0186'01' Barcode: 1089200316
Available
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