Growth of single crystalline and polycrystalline titanium nitride and zirconium nitride thin films by reactive sputtering : influence of low energy ion irradiation / L. Hultman

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Hultman, L.
Linköping : Universitet i Linköping
187 S.
englisch
917870345X
9789178703456
Linköping studies in science and technology. Dissertations ; 186

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