@book{ Solr-114312, title = {Growth of single crystalline and polycrystalline titanium nitride and zirconium nitride thin films by reactive sputtering : influence of low energy ion irradiation}, series = {Linköping studies in science and technology. Dissertations ;}, author = {Hultman, L.}, editor = {Hultman, L.}, note = {englisch}, }