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Cover Image

Silicon molecular beam epitaxy. vol 0001.

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Personal Name(s): Kasper, E., editor
Imprint: Boca-Raton, FL : CRC Pr., 1988.
Physical Description: 246 S.
Note: englisch
ISBN: 9780849368301
0849368308
Series Title: Silicon molecular beam epitaxy ; vol 0001.
Keywords: silicon MBE growth systems - technology and practice
silicon MBE: homoepitaxy
silicon MBE: models for silicon growth and dopant incorporation
silicon MBE: insulator over silicon structures
growth of insulators on silicon by MBE
silicon MBE: device application
Classification:
FGCD - Crystal growth of specific substances
FGKC - Vacuum deposition, MBE
FJKB - Elemental semiconductors
Shelf Classification:
FGK - Dünnfilmtechnologie, Epitaxie
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