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Practical surface analysis . 2 . Ion and neutral spectroscopy / ed. by D. Briggs ...

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Personal Name(s): Briggs, D., editor
Edition: 2nd ed.
Imprint: Chichester : Wiley, 1992
Physical Description: XVI, 738 S.
Note: englisch
ISBN: 0471964980
9780471964988
0471920827
9780471920823
Series Title: Practical surface analysis ; 2
Keywords: a perspective on the analysis of surfaces and interfaces
instrumentation for SIMS
basic aspects of sputter depth profiling
quantitative analysis using sputtering techniques: secondary ion and sputtered neutral mass spectrometry
dynamic SIMS and its application in microelectronics
static SIMS: surface analysis of inorganic materials
static SIMS: surface analysis of organic materials
sputtered neutral mass spectrometry (SNMS)
ion scattering spectroscopic techniques
medium energy ion scattering
angle resolved electron stimulated ion desorption for imaging the directions of molecule bonds
the role of standards in SIMS
computer codes and simulation: background to ion implantation distribution and sputtering programs
pure element sputtering yield data
masses and abundances of naturally occurring isotopes (data collection)
Subject (ZB):
surface analysis
ion beam analysis
Classification:
FHAB - Surface and thin film characterization
FGGJ - Ion beam analysis, ion beam solid interaction
Shelf Classification:
FHA - Materialcharakterisierung
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