Practical surface analysis . 2 . Ion and neutral spectroscopy / ed. by D. Briggs ...
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Personal Name(s): | Briggs, D., editor |
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Edition: |
2nd ed. |
Imprint: |
Chichester :
Wiley,
1992
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Physical Description: |
XVI, 738 S. |
Note: |
englisch |
ISBN: |
0471964980 9780471964988 0471920827 9780471920823 |
Series Title: |
Practical surface analysis ;
2 |
Keywords: |
a perspective on the analysis of surfaces and interfaces instrumentation for SIMS basic aspects of sputter depth profiling quantitative analysis using sputtering techniques: secondary ion and sputtered neutral mass spectrometry dynamic SIMS and its application in microelectronics static SIMS: surface analysis of inorganic materials static SIMS: surface analysis of organic materials sputtered neutral mass spectrometry (SNMS) ion scattering spectroscopic techniques medium energy ion scattering angle resolved electron stimulated ion desorption for imaging the directions of molecule bonds the role of standards in SIMS computer codes and simulation: background to ion implantation distribution and sputtering programs pure element sputtering yield data masses and abundances of naturally occurring isotopes (data collection) |
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Shelf Classification: |
ZB | |
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ZEA-3 | |
Institute ![]() |
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IEK-4 | |
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