Thin films by chemical vapour deposition.

preparation, properties and applications of thin cvd films

Saved in:
Morosanu, C. E.
rev., updated, and enl. ed.
Amsterdam : Elsevier, 1990.
717 S.
AUS D. RUM. UEBERS.
englisch
0444988017
9780444419033
0444419039
9780444988010
Thin films science and technology ; vol 0007.
fundamentals of thin CVD films
techniques of preparing thin films
chemical processes used in CVD
thermodynamics and kinetics of CVD
measurement of thin film thickness
nucleation and growth
thin film structure
characterization of CVD films
properties of CVD films
techniques, preparation and properties of thin CVD films
equipment and substrates
semiconducting thin films
amorphous insulating thin films
conductive thin films
superconducting and magnetic thin films
applications of thin CVD films

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