Thin films by chemical vapour deposition.
preparation, properties and applications of thin cvd films
Saved in:
| Personal Name(s): | Morosanu, C. E. |
|---|---|
| Edition: |
rev., updated, and enl. ed. |
| Imprint: |
Amsterdam :
Elsevier,
1990.
|
| Physical Description: |
717 S. |
| Note: |
AUS D. RUM. UEBERS. englisch |
| ISBN: |
0444988017 9780444419033 0444419039 9780444988010 |
| Series Title: |
Thin films science and technology ;
vol 0007. |
| Keywords: |
fundamentals of thin CVD films techniques of preparing thin films chemical processes used in CVD thermodynamics and kinetics of CVD measurement of thin film thickness nucleation and growth thin film structure characterization of CVD films properties of CVD films techniques, preparation and properties of thin CVD films equipment and substrates semiconducting thin films amorphous insulating thin films conductive thin films superconducting and magnetic thin films applications of thin CVD films |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
Call Number: S 005164-0007'01' Barcode: 1091106278
