Untersuchung mechanischer Eigenschaften von a-C:H- und a-SI :H-Schichten mittels Brillouin-Streuung und Nanoindenter / von Xin Jiang
study of mechanical properties of amorphous hydrogenated carbon and silicon layers by brillouin scattering and nanoindenter
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Personal Name(s): | Jiang, Xin, author |
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Imprint: |
Jülich :
Forschungszentrum, Zentralbibliothek,
1990
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Physical Description: |
92 Seiten, Anhang |
Note: |
deutsch |
Series Title: |
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Berichte des Forschungszentrums Jülich
2397 |
Dissertation Note: |
Zugleich: Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen
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Keywords: |
diamondlike carbon film |
Subject (ZB): | |
Classification: |
PTJ | |
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