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Untersuchung mechanischer Eigenschaften von a-C:H- und a-SI :H-Schichten mittels Brillouin-Streuung und Nanoindenter / von Xin Jiang

study of mechanical properties of amorphous hydrogenated carbon and silicon layers by brillouin scattering and nanoindenter

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Personal Name(s): Jiang, Xin, author
Imprint: Jülich : Forschungszentrum, Zentralbibliothek, 1990
Physical Description: 92 Seiten, Anhang
Note: deutsch
Series Title: Berichte des Forschungszentrums Jülich 2397
Dissertation Note:
Zugleich: Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen
Keywords: diamondlike carbon film
Subject (ZB):
amorphous silicon
diamond film
mechanical properties
hardness
Brillouin scattering
Classification:
FPQ - Surface friction, hardness, wear, lubrication
FJNC - Optical spectroscopy in solids
FJEC - Amorphous semiconductors
FPUG - Special purpose coatings
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PTJ
Institute Call Number: JUEL-2397 Barcode: 6133207926 Available   

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