Systemtechnische Analyse und Entwicklung eines Mikroventils in LIGA- Technik.
development of a microvalve by microfabrication
Saved in:
| Personal Name(s): | Kowanz, B. |
|---|---|
| Ehrfeld, W. | |
| Imprint: |
Karlsruhe :
Kernforschungszentrum Karlsruhe,
1991.
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| Physical Description: |
90 S. |
| Note: |
deutsch |
| Subject (ZB): | |
| Classification: |
| ZB | |
|---|---|
Open Stacks (Cellar)  Call Number: KFK-4886 Barcode: 6133208446
Available
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