Silicon. Supplement B5C. Silicon nitride in microelectronics and solar cells.

silicon nitride application to microelectronics and solar cells :

Personal Name(s):	Pebler, A., editor
	Krimmel, Eberhard F., Mitarb.
Imprint:	Berlin : Springer, 1991.
Physical Description:	XV, 400 S.
Note:	englisch
ISBN:	9780387936307 3540936300 0387936300 9783540936305
Series Title:	Gmelin handbook of inorganic and organometallic chemistry ; SI,Suppl.B5C.
Subject (ZB):	silicon nitride application microelectronics solar cell
Classification:	EISF - Thin film solar cells FGM - Microelectronic technology CBA - Gmelin handbook FJL - Physics of solid state devices
Shelf Classification:	CBA - Gmelin Handbuch