Silicon. Supplement B5C. Silicon nitride in microelectronics and solar cells.
silicon nitride application to microelectronics and solar cells :
Saved in:
Personal Name(s): | Pebler, A., editor |
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Krimmel, Eberhard F., Mitarb. | |
Imprint: |
Berlin :
Springer,
1991.
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Physical Description: |
XV, 400 S. |
Note: |
englisch |
ISBN: |
9780387936307 3540936300 0387936300 9783540936305 |
Series Title: |
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Gmelin handbook of inorganic and organometallic chemistry ;
SI,Suppl.B5C. |
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Classification: | |
Shelf Classification: |
ZB | |
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Reading Room Call number: CBA SI,S.B5C Barcode: 1091105421 Reference Collection |