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VLSI technology /

VLSI technology / edited by S.M. Sze.

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Personal Name(s): Sze, S. M.
Edition: 2nd ed.
Imprint: New York, NY : McGraw-Hill, 1988.
Physical Description: XII, 676 p.
Note: englisch
ISBN: 0070627355
9780070627352
Series Title: MacGraw-Hill series in electrical engineering. Electronics and electronic circuits.
Keywords: crystal growth and wafer preparation
epitaxy (for VLSI technology)
oxidation (in VLSI technology)
lithography
reactive plasma etching
dielectric and polysilicon film deposition
diffusion in solids and semiconductors
ion implantation (for VLSI technology)
metallization
VLSI process simulation
vlsi process integration
analytical techniques (in VLSI technology)
assembly techniques and packaging of VLSI devices
yield and reliability (in VLSI technology)
Subject (ZB):
VLSI technology
microelectronics
Classification:
FGM - Microelectronic technology
Shelf Classification:
FGM - Mikroelektronik - Technologie
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Institute Call Number: B 056561'02' Barcode: 1091103506 Available   
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Reading Room Call Number: FGM 027 Barcode: 1091100210 Available   

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