VLSI technology / edited by S.M. Sze.
Saved in:
| Personal Name(s): | Sze, S. M. |
|---|---|
| Edition: |
2nd ed. |
| Imprint: |
New York, NY :
McGraw-Hill,
1988.
|
| Physical Description: |
XII, 676 p. |
| Note: |
englisch |
| ISBN: |
0070627355 9780070627352 |
| Series Title: |
MacGraw-Hill series in electrical engineering. Electronics and electronic circuits.
|
| Keywords: |
crystal growth and wafer preparation epitaxy (for VLSI technology) oxidation (in VLSI technology) lithography reactive plasma etching dielectric and polysilicon film deposition diffusion in solids and semiconductors ion implantation (for VLSI technology) metallization VLSI process simulation vlsi process integration analytical techniques (in VLSI technology) assembly techniques and packaging of VLSI devices yield and reliability (in VLSI technology) |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
Call Number: B 056561'02' Barcode: 1097103734
