VLSI technology / edited by S.M. Sze.

Saved in:
Sze, S. M.
2nd ed.
New York, NY : McGraw-Hill, 1988.
XII, 676 p.
englisch
0070627355
9780070627352
MacGraw-Hill series in electrical engineering. Electronics and electronic circuits.
crystal growth and wafer preparation
epitaxy (for VLSI technology)
oxidation (in VLSI technology)
lithography
reactive plasma etching
dielectric and polysilicon film deposition
diffusion in solids and semiconductors
ion implantation (for VLSI technology)
metallization
VLSI process simulation
vlsi process integration
analytical techniques (in VLSI technology)
assembly techniques and packaging of VLSI devices
yield and reliability (in VLSI technology)

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