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VLSI technology / edited by S.M. Sze.
|Personal Name(s):||Sze, S. M.|
New York, NY :
XII, 676 p.
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MacGraw-Hill series in electrical engineering. Electronics and electronic circuits.
crystal growth and wafer preparation
epitaxy (for VLSI technology)
oxidation (in VLSI technology)
reactive plasma etching
dielectric and polysilicon film deposition
diffusion in solids and semiconductors
ion implantation (for VLSI technology)
VLSI process simulation
vlsi process integration
analytical techniques (in VLSI technology)
assembly techniques and packaging of VLSI devices
yield and reliability (in VLSI technology)