Excimer lasers and new trends in laser microtechnology : International symposium workshop on excimer lasers and new trends in laser microtechnology: papers : Bremen, 10.11.92-13.11.92.
Saved in:
Personal Name(s): | Metev, S., editor |
---|---|
Imprint: |
Bamberg :
Verlag Meisenbach,
1993.
|
Physical Description: |
192 S. |
Note: |
englisch |
ISBN: |
3875250605 9783875250602 |
Subject (ZB): | |
Classification: |
LEADER | 01261nam a2200385 n 4500 | ||
---|---|---|---|
001 | 140395 | ||
005 | 19970520000000.0 | ||
008 | r1993 | ||
020 | |a 3875250605 | ||
035 | |a (Sirsi) a124736 | ||
084 | 0 | |a PEJ - Laser physics, laser materials |2 ZB | |
245 | 0 | 0 | |a Excimer lasers and new trends in laser microtechnology : |b International symposium workshop on excimer lasers and new trends in laser microtechnology: papers : Bremen, 10.11.92-13.11.92. |
260 | |a Bamberg : |b Verlag Meisenbach, |c 1993. | ||
300 | |a 192 S. | ||
500 | |a englisch | ||
596 | |a 1 | ||
650 | 4 | |a laser | |
650 | 4 | |a microtechnology | |
650 | 4 | |a gas | |
650 | 4 | |a microelectronics | |
650 | 4 | |a ablation | |
650 | 4 | |a chemical etching | |
650 | 4 | |a synthesis | |
650 | 4 | |a processing | |
650 | 4 | |a diamond | |
650 | 4 | |a irradiation | |
650 | 4 | |a polypropylene | |
650 | 4 | |a surface activity | |
650 | 4 | |a technology transfer | |
700 | 1 | |a Metev, S., |e Hrsg. | |
710 | 2 | |a American Gas Association. | |
710 | 2 | |a Bremer Institut für Angewandte Strahltechnik. | |
900 | |a B 073269'01' | ||
908 | |a Konferenz | ||
949 | |a B 073269'01' |w LC |c 1 |i 1094102259 |d 1/6/1999 |e 30/3/1999 |l STACKS |m ZB |n 2 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-P |1 PRINT |2 KONFERENZ |