Optical characterization of real surfaces and films.
Saved in:
Personal Name(s): | Vedam, K., editor |
---|---|
Imprint: |
San-Diego, CA :
Academic Pr.,
1994.
|
Physical Description: |
XV, 328 S. |
Note: |
englisch |
ISBN: |
9780125330190 0125330197 |
Series Title: |
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Physics of thin films ;
19. |
Keywords: |
in situ studies of crystalline semiconductor surfaces by reflectance anisotropy real- time spectroscopic ellipsometric studies of the nucleation, growth, and optical functions of thin films part 1: tetrahedrally bonded materials real- time spectroscopic ellipsometric studies of the nucleation, growth, and optical functions of thin films part 1: aluminum optical characterization of inhomogeneous transparent films on transparent substrates by spectroscopic ellipsometry characterization of ferroelectric films by spectroscopic ellipsometry effects of optical anisotropy on spectro- ellipsometric data for thin films and surfaces |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
LEADER | 01791cam a2200409 n 4500 | ||
---|---|---|---|
001 | 141923 | ||
005 | 19971208000000.0 | ||
008 | r1994 | ||
020 | |a 0125330197 | ||
035 | |a (Sirsi) a126134 | ||
084 | 0 | |a FFP - Physics of thin films |2 ZB | |
084 | 0 | |a FHAB - Surface and thin film characterization |2 ZB | |
084 | 0 | |a FJNC - Optical spectroscopy in solids |2 ZB | |
084 | 1 | |a FFP - Physik dünner Filme |2 LS | |
245 | 0 | 0 | |a Optical characterization of real surfaces and films. |
260 | |a San-Diego, CA : |b Academic Pr., |c 1994. | ||
300 | |a XV, 328 S. | ||
490 | 0 | |a Physics of thin films ; |v 19. | |
500 | |a englisch | ||
596 | |a 1 | ||
650 | 4 | |a thin film physics | |
650 | 4 | |a surface analysis | |
650 | 4 | |a optical spectroscopy | |
650 | 4 | |a ellipsometry | |
653 | |a in situ studies of crystalline semiconductor surfaces by reflectance anisotropy | ||
653 | |a real- time spectroscopic ellipsometric studies of the nucleation, growth, and optical functions of thin films | ||
653 | |a part 1: tetrahedrally bonded materials | ||
653 | |a real- time spectroscopic ellipsometric studies of the nucleation, growth, and optical functions of thin films | ||
653 | |a part 1: aluminum | ||
653 | |a optical characterization of inhomogeneous transparent films on transparent substrates by spectroscopic ellipsometry | ||
653 | |a characterization of ferroelectric films by spectroscopic ellipsometry | ||
653 | |a effects of optical anisotropy on spectro- ellipsometric data for thin films and surfaces | ||
700 | 1 | |a Vedam, K., |e Hrsg. | |
900 | |a S 000482-0019'01' | ||
900 | |a FFP 001-19 | ||
908 | |a Monographie, Sammelwerk | ||
949 | |a FFP 001-19 |w LC |c 1 |i 1095100608 |d 6/6/2013 |e 2/5/2013 |l STACKS |m ZB |n 13 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |