Silicon processing for the VLSI era. 2. Process integration.
Saved in:
| Personal Name(s): | Wolf, Stanley. |
|---|---|
| Imprint: |
Sunset-Beach, CA :
Lattice Press,
1990.
|
| Physical Description: |
XXXI, 753 S. |
| Note: |
englisch |
| ISBN: |
0961672145 9780961672140 |
| Series Title: |
Silicon processing for the VLSI era ;
2. |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
| LEADER | 00905cam a2200277 n 4500 | ||
|---|---|---|---|
| 001 | 142242 | ||
| 005 | 20010214084600.0 | ||
| 008 | r1990 | ||
| 020 | |a 0961672145 | ||
| 035 | |a (Sirsi) a126397 | ||
| 084 | 0 | |a FGM - Microelectronic technology |2 ZB | |
| 084 | 1 | |a FGM - Mikroelektronik - Technologie |2 LS | |
| 245 | 0 | 0 | |a Silicon processing for the VLSI era. |n 2. |p Process integration. |
| 260 | |a Sunset-Beach, CA : |b Lattice Press, |c 1990. | ||
| 300 | |a XXXI, 753 S. | ||
| 490 | 0 | |a Silicon processing for the VLSI era ; |v 2. | |
| 500 | |a englisch | ||
| 596 | |a 1 | ||
| 650 | 4 | |a VLSI technology | |
| 650 | 4 | |a integrated circuit | |
| 650 | 4 | |a silicon | |
| 700 | 1 | |a Wolf, Stanley. | |
| 900 | |a B 061161'01'-002 | ||
| 900 | |a FGM 053-02 | ||
| 908 | |a Monographie, Sammelwerk | ||
| 949 | |a FGM 053-02 |w LC |c 1 |i 1095103322 |d 6/7/2011 |e 20/6/2011 |l STACKS |m ZB |n 38 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT | ||