Silicon processing for the VLSI era. 2. Process integration.
Saved in:
| Personal Name(s): | Wolf, Stanley. |
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| Imprint: |
Sunset-Beach, CA :
Lattice Press,
1990.
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| Physical Description: |
XXXI, 753 S. |
| Note: |
englisch |
| ISBN: |
0961672145 9780961672140 |
| Series Title: |
Silicon processing for the VLSI era ;
2. |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
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Reading Room  Call Number: FGM 053-02 Barcode: 1095103322
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