Silicon processing for the VLSI era. 2. Process integration.
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Personal Name(s): | Wolf, Stanley. |
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Imprint: |
Sunset-Beach, CA :
Lattice Press,
1990.
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Physical Description: |
XXXI, 753 S. |
Note: |
englisch |
ISBN: |
0961672145 9780961672140 |
Series Title: |
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Silicon processing for the VLSI era ;
2. |
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Reading Room Call number: FGM 053-02 Barcode: 1095103322 Available |