PACVD of TiN / Blagica Bliznakovska, Horst-Reiner Kötter and Christoph Meixner in cooperation with Stefan Krawczynski and Milosav Milosevski
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Table of Contents |
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| Personal Name(s): | Bliznakovska, Blagica, author |
| Kötter, Horst-Reiner, author / Meixner, Christoph, author / Krawczynski, Stefan, author / Milosevski, Milosav, author | |
| Imprint: |
Jülich :
Forschungszentrum, Zentralbibliothek,
1995
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| Physical Description: |
II, 51 Seiten |
| Note: |
englisch |
| ISBN: |
3893361472 9783893361472 |
| Series Title: |
German cooperation in scientific research and technological development with the Faculty of Technology and Metallurgy University Kiril i Metodij, Skopje
Scientific series of the International Bureau ; 29 |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
| LEADER | 01641cam a2200373 n 4500 | ||
|---|---|---|---|
| 001 | 142798 | ||
| 005 | 20050208151800.0 | ||
| 008 | r1995 eng | ||
| 020 | |a 3893361472 | ||
| 035 | |a (Sirsi) a126900 | ||
| 041 | |a eng | ||
| 084 | 0 | |a FGKF - Chemical vapor deposition | |
| 084 | 1 | |a FZJ - Schriftenreihen des Forschungszentrums Jülich | |
| 100 | |a Bliznakovska, Blagica, |e Verfasser | ||
| 245 | 0 | 0 | |a PACVD of TiN / |c Blagica Bliznakovska, Horst-Reiner Kötter and Christoph Meixner in cooperation with Stefan Krawczynski and Milosav Milosevski |
| 260 | |a Jülich : |b Forschungszentrum, Zentralbibliothek, |c 1995 | ||
| 300 | |a II, 51 Seiten | ||
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 490 | 0 | |a German cooperation in scientific research and technological development with the Faculty of Technology and Metallurgy University Kiril i Metodij, Skopje | |
| 490 | 0 | |a Scientific series of the International Bureau ; |v 29 | |
| 500 | |a englisch | ||
| 596 | |a 1 | ||
| 650 | 4 | |a chemical vapor deposition | |
| 700 | |a Kötter, Horst-Reiner, |e Verfasser | ||
| 700 | |a Meixner, Christoph, |e Verfasser | ||
| 700 | |a Krawczynski, Stefan, |e Verfasser | ||
| 700 | |a Milosevski, Milosav, |e Verfasser | ||
| 856 | |u http://wwwzb.fz-juelich.de/contentenrichment/inhaltsverzeichnisse/2010/verlag/scient29_i.pdf |z Inhaltsverzeichnis | ||
| 900 | |a FZJ 027-029 | ||
| 900 | |a S 006928-0029'01' | ||
| 908 | |a Bericht, Gutachten | ||
| 949 | |a FZJ 027-029 |w LC |c 1 |i 1095102145 |d 8/2/2005 |l STACKS |m ZB |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-FZJ |1 PRINT |2 RP | ||