Laser-assisted microtechnology / Simeon M. Metev ; Vadim P. Veiko.
micromachining of thin films
Saved in:
Personal Name(s): | Metev, Simeon M. |
---|---|
Veiko, Vadim P. | |
Imprint: |
Berlin :
Springer,
1994.
|
Physical Description: |
X, 240 S. |
Note: |
englisch |
ISBN: |
9783540539254 0387539255 3540539255 9780387539256 |
Series Title: |
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Springer series in materials science ;
19. |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
LEADER | 01143cam a2200349 n 4500 | ||
---|---|---|---|
001 | 142818 | ||
005 | 19990325110200.0 | ||
008 | r1994 | ||
020 | |a 3540539255 | ||
020 | |a 0387539255 | ||
035 | |a (Sirsi) a126918 | ||
084 | 0 | |a FGT - Microtechnology |2 ZB | |
084 | 0 | |a FGJ - Laser and electron beam processing |2 ZB | |
084 | 1 | |a FGT - Mikrotechnik |2 LS | |
245 | 0 | 0 | |a Laser-assisted microtechnology / |c Simeon M. Metev ; Vadim P. Veiko. |
260 | |a Berlin : |b Springer, |c 1994. | ||
300 | |a X, 240 S. | ||
490 | 0 | |a Springer series in materials science ; |v 19. | |
500 | |a englisch | ||
520 | |a micromachining of thin films | ||
520 | |a microprocessing of materials | ||
520 | |a maskless laser micropatterning | ||
520 | |a laser assisted synthesis of thin film systems | ||
596 | |a 1 | ||
650 | 4 | |a microtechnology | |
650 | 4 | |a laser processing | |
700 | 1 | |a Metev, Simeon M. | |
700 | 1 | |a Veiko, Vadim P. | |
900 | |a FGT 004 | ||
900 | |a S 005950-0019'01' | ||
908 | |a Monographie, Sammelwerk | ||
949 | |a FGT 004 |w LC |c 1 |i 1095102252 |d 13/1/1999 |l STACKS |m ZB |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |