Thin film processes / edited by John L. Vossen, Werner Kern.
Thin film processes
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Personal Name(s): | Vossen, John L. |
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Kern, Werner. | |
Imprint: |
New York :
Academic Press,
1978.
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Physical Description: |
xi, 564 p. |
Note: |
englisch |
ISBN: |
9780127282503 0127282505 |
Keywords: |
epitaxy : methodology review : sputtering : chemical vapor deposition : etching |
Classification: | |
Shelf Classification: |