Processing of semiconductors.
silicon processing
Saved in:
Personal Name(s): | Jackson, K. A., editor |
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Imprint: |
Weinheim :
VCH Verl. Ges.,
1996.
|
Physical Description: |
689 S. |
Note: |
englisch |
ISBN: |
1560811900 9783527268139 9781560811909 3527268138 |
Series Title: |
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Materials science and technology ;
16. |
Subject (ZB): | |
Classification: | |
Shelf Classification: |