Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]
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| Personal Name(s): | Brewer, George Raymond. |
|---|---|
| Ballantyne, J. P. | |
| Imprint: |
New York :
Academic Press,
1980.
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| Physical Description: |
xi, 362 p. |
| Note: |
englisch |
| ISBN: |
012133550X 9780121335502 |
| Keywords: |
electron beam lithography : microelectronics |
| Classification: | |
| Shelf Classification: |
| ZB | |
|---|---|
Reading Room  Call Number: FGM 082 Barcode: 1080009173
Available
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