Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]
Saved in:
Personal Name(s): | Brewer, George Raymond. |
---|---|
Ballantyne, J. P. | |
Imprint: |
New York :
Academic Press,
1980.
|
Physical Description: |
xi, 362 p. |
Note: |
englisch |
ISBN: |
012133550X 9780121335502 |
Keywords: |
electron beam lithography : microelectronics |
Classification: | |
Shelf Classification: |
LEADER | 00898nam a2200253 n 4500 | ||
---|---|---|---|
001 | 3703 | ||
005 | 19970313000000.0 | ||
008 | r1980 | ||
020 | |a 012133550X | ||
035 | |a (Sirsi) a13514 | ||
084 | 0 | |a FGME - Microlithography |2 ZB | |
084 | 1 | |a FGM - Mikroelektronik - Technologie |2 LS | |
245 | 0 | 0 | |a Electron-beam technology in microelectronic fabrication / |c edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.] |
260 | |a New York : |b Academic Press, |c 1980. | ||
300 | |a xi, 362 p. | ||
500 | |a englisch | ||
596 | |a 1 | ||
653 | |a electron beam lithography : microelectronics | ||
700 | 1 | |a Brewer, George Raymond. | |
700 | 1 | |a Ballantyne, J. P. | |
900 | |a B 051480'01' | ||
900 | |a FGM 082 | ||
908 | |a Monographie, Sammelwerk | ||
949 | |a FGM 082 |w LC |c 1 |i 1080009173 |d 20/2/2007 |e 19/1/2007 |l STACKS |m ZB |n 2 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |