Handbook of microlithography, micromachining, and microfabrication. 2. Micromachining and microfabrication / P. Rai-Choudhury, ed.
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Personal Name(s): | Rai-Choudhury, P., editor |
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Imprint: |
Bellingham, Wash. :
SPIE Optical Engineering Pr.,
1997.
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Physical Description: |
VIII, 692 S. |
Note: |
englisch |
ISBN: |
0819423793 9780819423795 |
Series Title: |
/* Depending on the record driver, $field may either be an array with
"name" and "number" keys or a flat string containing only the series
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SPIE Press monograph ;
PM40. /* Depending on the record driver, $field may either be an array with "name" and "number" keys or a flat string containing only the series name. We should account for both cases to maximize compatibility. */?> IEE materials and devices series ; 12B. /* Depending on the record driver, $field may either be an array with "name" and "number" keys or a flat string containing only the series name. We should account for both cases to maximize compatibility. */?> Handbook of microlithography, micromachining, and microfabrication ; 2. |
Keywords: |
wet chemical etching of silicon applications of dry etching to microsensors focused ion beams for mocromachining and microchemistry plating techniques high aspects ratio processing sensors and actuators microoptical devices micromachined systems for neurophysiological applications thin film transistor addressed liquid crystal displays smart materials and smart electronics |
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Reading Room Call number: FGM 050-02 Barcode: 1098101544 Available |