Microelectronic device technology. 2 : 23 - 24 September 1998, Santa Clara, California / David Burnett (ed.) ...
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| Personal Name(s): | Burnett, David, editor |
|---|---|
| Imprint: |
Bellingham, Wash. :
SPIE,
1998.
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| Physical Description: |
VII, 356 S. |
| Note: |
englisch |
| ISBN: |
0819429651 9780819429650 |
| Series Title: |
Microelectronic device technology ;
2. SPIE proceedings ; 3506. |
| Subject (ZB): | |
| Classification: |
| ZB | |
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Open Stacks  Call Number: S 002308-3506'01' Barcode: 1200100812
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