Microelectronic device technology. 23 - 24 September 1998, Santa Clara, California / David Burnett (ed.) ... 2 :

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Burnett, David, (editor)
Bellingham, Wash. : SPIE, 1998.
VII, 356 S.
englisch
0819429651
9780819429650
Microelectronic device technology ; 2.
SPIE proceedings ; 3506.

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