International Electron Devices Meeting. 2005 : IEDM : short course feedback next generation semiconductor manufacturing : [Washington, DC December 4, 2005 / Institute of Electrical and Electronics Engineers]
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Imprint: |
Piscataway, NJ :
IEEE,
2005.
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Physical Description: |
Getr. Pag. |
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englisch |
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IFF | |
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Institute Call number: B 089816'01' Barcode: 1206100135 Available |