Handbook of semiconductor silicon technology / edited by William C. O'Mara ; Robert B. Herring ; Lee P. Hunt
Saved in:
Personal Name(s): | O'Mara, William C., editor |
---|---|
Herring, Robert B., editor / Hunt, Lee P., editor | |
Imprint: |
Park Ridge, N.J. :
Noyes Publications,
1990
|
Physical Description: |
XX, 795 Seiten |
Note: |
englisch |
ISBN: |
0815512376 9780815512370 |
Keywords: |
silicon precursors: their manufacture and properties polysilicon preparation crystal growth of silicon silicon wafer preparation silicon epitaxy silicon material properties oxygen, carbon and nitrogen in silicon carrier lifetimes in silicon preparation and properties of polycrystalline silicon films silicon phase diagrams |
Subject (ZB): | |
Classification: |
LEADER | 01666nam a2200457 n 4500 | ||
---|---|---|---|
001 | 7876 | ||
005 | 19970314000000.0 | ||
008 | r1990 eng | ||
020 | |a 0815512376 | ||
035 | |a (Sirsi) a17088 | ||
041 | |a eng | ||
084 | 0 | |a FGM - Microelectronic technology | |
084 | 0 | |a FJKB - Elemental semiconductors | |
245 | 0 | 0 | |a Handbook of semiconductor silicon technology / |c edited by William C. O'Mara ; Robert B. Herring ; Lee P. Hunt |
264 | |a Park Ridge, N.J. : |b Noyes Publications, |c 1990 | ||
300 | |a XX, 795 Seiten | ||
336 | |a Text |b txt |2 rdacontent | ||
337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
338 | |a Band |b nc |2 rdacarrier | ||
500 | |a englisch | ||
596 | |a 1 | ||
650 | 4 | |a microelectronics | |
650 | 4 | |a microfabrication (for microelectronics only) | |
650 | 4 | |a silicon | |
650 | 4 | |a semiconductor processing | |
653 | |a silicon precursors: their manufacture and properties | ||
653 | |a polysilicon preparation | ||
653 | |a crystal growth of silicon | ||
653 | |a silicon wafer preparation | ||
653 | |a silicon epitaxy | ||
653 | |a silicon material properties | ||
653 | |a oxygen, carbon and nitrogen in silicon | ||
653 | |a carrier lifetimes in silicon | ||
653 | |a preparation and properties of polycrystalline silicon films | ||
653 | |a silicon phase diagrams | ||
700 | 1 | |a O'Mara, William C., |e Herausgeber | |
700 | 1 | |a Herring, Robert B., |e Herausgeber | |
700 | 1 | |a Hunt, Lee P., |e Herausgeber | |
900 | |a B 073857'01' | ||
908 | |a Handbuch | ||
949 | |a B 073857'01' |w LC |c 1 |i 1094103633 |d 11/12/2002 |l STACKS |m ZB |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |2 HB |