High resolution focused ion beams : FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology / Jon Orloff ; Mark Utlaut and Lynwood Swanson.
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Table of Contents |
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Personal Name(s): | Orloff, Jon. |
Utlaut, Mark. / Swanson, Lynwood. | |
Imprint: |
New York, NY :
Kluwer Academic/Plenum Publ.,
2003.
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Physical Description: |
X, 303 S. |
Note: |
englisch |
ISBN: |
9780306473500 030647350X |
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ZB | |
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Reading Room Call number: FGG 006 Barcode: 1206102075 Available |