Microelectronic applications of chemical mechanical planarization / ed. by Yuzhuo Li.
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Table of Contents |
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Personal Name(s): | Li, Yuzhuo, editor |
Imprint: |
New York, NY :
Wiley,
2008.
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Physical Description: |
XXV, 734 S. |
Note: |
englisch |
ISBN: |
9780471719199 |
Subject (ZB): | |
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Reading Room Call number: FGM 044 Barcode: 1207103154 Available |