Materials science in microelectronics. 1 [E-Book] : the relationship between thin film processing and structure / E. S. Machlin.
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Full text |
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Personal Name(s): | Machlin, E. S. |
Edition: |
2nd ed. |
Imprint: |
Amsterdam :
Elsevier,
2005
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ISBN: |
9780080446400 |
Series Title: |
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Materials science in microelectronics ;
1. |
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