Surfaces, interfaces, an thin films for microelectronics / Eugene A. Irene.
Saved in:
Table of Contents |
|
Personal Name(s): | Irene, Eugene A. |
Imprint: |
Hoboken, NJ :
Wiley Interscience,
2008.
|
Physical Description: |
XIII, 515 S. |
Note: |
englisch |
ISBN: |
9780470174470 |
Subject (ZB): | |
Classification: |
LEADER | 01489cam a2200421 n 4500 | ||
---|---|---|---|
001 | 229198 | ||
005 | 20081223141900.0 | ||
008 | r2008 | ||
020 | |a 9780470174470 | ||
035 | |a (Sirsi) a178602 | ||
084 | 0 | |a FJL - Physics of solid state devices |2 ZB | |
084 | 0 | |a FJH - Semiconductor physics |2 ZB | |
084 | 0 | |a FJC - Electronic properties of solids |2 ZB | |
084 | 0 | |a TBD - Microelectronics |2 ZB | |
245 | 0 | 0 | |a Surfaces, interfaces, an thin films for microelectronics / |c Eugene A. Irene. |
260 | |a Hoboken, NJ : |b Wiley Interscience, |c 2008. | ||
300 | |a XIII, 515 S. | ||
500 | |a englisch | ||
596 | |a 11 | ||
650 | 4 | |a surface physics | |
650 | 4 | |a surface properties | |
650 | 4 | |a surface structure | |
650 | 4 | |a surface electronic properties | |
650 | 4 | |a surface electronic structure | |
650 | 4 | |a surface interaction | |
650 | 4 | |a surface friction | |
650 | 4 | |a surface chemistry | |
650 | 4 | |a interface | |
650 | 4 | |a microelectronics | |
650 | 4 | |a thin film | |
650 | 4 | |a thin film technology | |
650 | 4 | |a semiconductor surface | |
650 | 4 | |a semiconductor device | |
700 | 1 | |a Irene, Eugene A. | |
856 | |u http://wwwzb.fz-juelich.de/contentenrichment/inhaltsverzeichnisse/bis2009/ISBN-978-0-470-17447-0.pdf |z Inhaltsverzeichnis | ||
900 | |a B 091821'01' | ||
908 | |a Monographie, Sammelwerk | ||
949 | |a B 091821'01' |w LC |c 1 |i 1208101971 |d 9/2/2009 |e 23/12/2008 |l STACKS |m IBN-3-4 |n 1 |r Y |s Y |t INSTB |u 25/3/2009 |x INST-F |z KM_07 |1 PRINT |