Projected range statistics: semiconductors and related materials.

Saved in:
Gibbons, J. F.
Johnson, W. S. / Mylroie, S. W.
2.ed.
Stroudsburg,PA : Dowden, Hutchinson and Ross, 1975.
CA 300 S.
englisch
9780470297391
0470297395
semiconductor : ion range : ion implantation