Ion implantation, sputtering and their applications / by P. D. Townsend ; J. C. Kelly ; N. E. W. Hartley.
Saved in:
Personal Name(s): | Townsend, P. D. |
---|---|
Kelly, J. C. / Hartley, N. E. W. | |
Imprint: |
London :
Academic Press,
1976.
|
Physical Description: |
IX, 333 S. |
Note: |
englisch |
ISBN: |
9780126969504 0126969507 |
Keywords: |
ion implantation : textbook : application sputtering : review : application |
Classification: |