Integrated chemical microsensor systems in CMOS technology [E-Book] / Andreas Hierlemann.
Hierlemann, Andreas.
Berlin : Springer, 2005
9783540237822
Microtechnology and MEMS.
Optical materials
Nanotechnology
Surfaces (Physics)
Electronics
Analytical biochemistry
Weights and measures
Chemistry
Optical and Electronic Materials
Nanotechnology
Surfaces and Interfaces, Thin Films
Electronics and Microelectronics, Instrumentation
Analytical Chemistry
Measurement Science, Instrumentation
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