"Gettering defects in semiconductors [E-Book] / Victor A. Perevoschikov ; Vladimir D. Skoupov."
Perevoschikov, Victor A.
Skoupov, Vladimir D.
Berlin : Springer, 2005
9783540262442
Springer series in advanced microelectronics ; 19.
Optical materials
Chemical engineering
Chemistry
Optical and Electronic Materials
Industrial Chemistry/Chemical Engineering
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