Electroceramic-based MEMS [E-Book] : fabrication-technology and applications / ed. by Nava Setter.
Setter, Nava, (editor)
Boston, MA : Springer, 2005
9780387233109
Electronic materials ; 9.
Optical materials
Nanotechnology
Materials
Electronics
Chemistry
Optical and Electronic Materials
Nanotechnology
Characterization and Evaluation Materials
Ceramics, Glass, Composites, Natural Methods
Electronics and Microelectronics, Instrumentation
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